IP Library › Granted Patent US 7,265,014
Granted Patent B1
US 7,265,014 · App. 10/799,413 · Granted Sep 4, 2007

Avoiding field oxide gouging in shallow trench isolation (STI) regions

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Quick Facts
Patent No.
US 7,265,014
App. No.
10/799,413
Filed
Mar 12, 2004
Granted
Sep 4, 2007
Kind
B1
Examiner
MAI, ANH D
Art Unit
2814
USPC
438/257
Abstract

A method and device for avoiding oxide gouging in shallow trench isolation (STI) regions of a semiconductor device. A trench may be etched in an STI region and filled with insulating material. An anti-reflective coating (ARC) layer may be deposited over the STI region and extend beyond the boundaries of the STI region. A portion of the ARC layer may be etched leaving a remaining portion of the ARC layer over the STI region and extending beyond the boundaries of the STI region. A protective cap may be deposited to cover the remaining portion of the ARC layer as well as the insulating material. The protective cap may be etched back to expose the ARC layer. However, the protective cap still covers and protects the insulating material. By providing a protective cap that covers the insulating material, gouging of the insulating material in STI regions may be avoided.

Claims (34)

1. A method for avoiding oxide gouging in shallow trench isolation (STI) regions of a semiconductor device comprising the steps of:

etching a trench in an STI region;

filling said trench with an insulating material;

depositing an anti-reflective coating layer over said STI region and extending beyond the boundaries of said STI region;

etching a portion of said anti-reflective coating layer over said STI region leaving a remaining portion of said anti-reflective coating layer over said STI region and extending beyond the boundaries of said STI region; and

depositing a protective cap covering said STI region and extending beyond the boundaries of said STI region, wherein said protective cap covers said remaining portion of said anti-reflective coating layer and said insulating material over said STI region;

wherein said protective cap comprises photoresist material.

2. The method as recited in claim 1 , wherein said photoresist material has a thickness of about 800 Å to 1200 Å.

3. A method for avoiding oxide gouging in shallow trench isolation (STI) regions of a semiconductor device comprising the steps of:

etching a trench in an STI region;

filling said trench with an insulating material;

depositing an anti-reflective coating layer over said STI region and extending beyond the boundaries of said STI region;

etching a portion of said anti-reflective coating layer over said STI region leaving a remaining portion of said anti-reflective coating layer over said STI region and extending beyond the boundaries of said STI region;

depositing a protective cap covering said STI region and extending beyond the boundaries of said STI region, wherein said protective cap covers said remaining portion of said anti-reflective coating layer and said insulating material over said STI region;

etching a portion of said protective cap to expose said remaining portion of said anti-reflective coating layer while maintaining protection of said insulating material; and

etching said remaining portion of said anti-reflective coating layer;

wherein said insulating material is protected during etching of said remaining portion of said anti-reflective coating layer by said protective cap.

4. The method as recited in claim 3 , wherein said remaining portion of said anti-reflective coating layer is etched using a plasma etch process.

5. A method for avoiding oxide gouging in shallow trench isolation (STI) regions of a semiconductor device comprising the steps of:

etching a trench in an STI region;

filling said trench with an insulating material;

forming a gate oxide layer overlying said STI region and extending beyond the boundaries of said STI region;

depositing a polysilicon layer over said gate oxide layer;

depositing an anti-reflective coating layer over said polysilicon layer;

etching a portion of said anti-reflective coating layer over said STI region leaving a remaining portion of said anti-reflective coating layer over said STI region and extending beyond the boundaries of said STI region;

etching an exposed portion of said polysilicon layer and said gate oxide layer over said STI region leaving a remaining portion of said polysilicon layer and said gate oxide layer over said STI region and extending beyond the boundaries of said STI region;

depositing a protective cap over said STI region and extending beyond the boundaries of said STI region, wherein said protective cap covers said remaining portion of said anti-reflective coating layer over said STI region and covers said insulating material over said STI region;

etching a portion of said protective cap to expose said remaining portion of said anti-reflective coating layer while maintaining protection of said insulating material; and

etching said remaining portion of said anti-reflective coating layer;

wherein said insulating material is protected during etching of said remaining portion of said anti-reflective coating layer by said protective cap.

6. The method as recited in claim 1 , wherein said protective cap comprises photoresist material.

7. The method as recited in claim 6 , wherein said photoresist material has a thickness of about 800 Å to 1200 Å.

8. The method as recited in claim 1 , wherein said remaining portion of said anti-reflective coating layer is etched using a plasma etch process.

9. The method as recited in claim 1 , wherein said insulating material comprises thermal oxide.