Semiconductor memory device and method of fabricating the same
View Patent ↗A silicon nitride film for storing electric charge is formed on a semiconductor substrate while placing a tunnel oxide film in between, and the silicon nitride film is then subjected to hydrogen plasma treatment so as to effectively erase unnecessary charge stored therein during various process steps in fabrication of the semiconductor memory device, to thereby stabilize the threshold voltage (V th ) of the semiconductor memory device.
1. A semiconductor memory device being formed as a charge storage film for storing electric charge over a semiconductor substrate, said semiconductor memory device comprising:
a first contact body used for wiring connection, and
a second contact body not used for wiring connection but used for facilitating diffusion of hydrogen radicals or hydrogen molecules into said charge storage film;
wherein the first contact body and the second contact body are formed to be connected separately from each other to a diffusion layer formed in the surface of the semiconductor substrate.
2. The semiconductor memory device according to claim 1 , wherein said charge storage film is any one of
a nitride film,
a double-layered film comprising an oxide film and a nitride film, and
a three-layered film comprising an oxide film, a nitride film and an oxide film.