Liquid crystal display device
View Patent ↗In a bottom-gate-type thin film transistor used in a liquid crystal display device in which a poly-Si layer and an a-Si layer are stacked, a quantity of an ON current which flows in the thin film transistor can be increased. A poly-Si layer and an a-Si layer are stacked on a gate electrode as an active layer by way of a gate insulation film therebetween in order of the poly-Si layer and the a-Si layer. An n+Si layer and a source/drain layer are formed on the a-Si layer thus forming a thin film transistor. A forward current which flows in the thin film transistor mainly flows in the poly-Si layer. To decrease contact resistance against the forward current between the poly-Si layer and the n+Si layer, an edge portion of the a-Si layer and an edge portion of the poly-Si layer assume a concavo-convex shape thus particularly increasing a contact area between the poly-Si layer and the n+Si layer whereby the contact resistance against the forward current can be decreased leading to the increase of a quantity of an ON current.
1. A liquid crystal display device comprising:
a display region in which pixel electrodes and pixel-use TFTs are arranged in a matrix array; and
a driver circuit which includes a driver circuit-use TFT and is formed on a periphery of the display region, wherein
the pixel-use TFT is a bottom-gate-type TFT in which an active layer is formed of an a-Si layer,
the driver circuit-use TFT is a bottom-gate-type TFT in which an active layer is formed by stacking a poly-Si layer and an a-Si layer in order of the poly-Si layer and the a-Si layer, an n+Si layer is formed so as to cover the a-Si layer and the poly-Si layer, and an SD electrode is formed so as to cover the n+Si layer, and
a side of the poly-Si layer which is brought into contact with the n+Si layer assumes a rectangular-wave concavo-convex shape.
2. A liquid crystal display device according to claim 1 , wherein a depth of the concavo-convex shape is set to 0.5 μm or more.
3. A liquid crystal display device according to claim 1 , wherein the rectangular-wave concavo-convex shape comprises at least two different depths.
4. A liquid crystal display comprising:
a display region in which pixel electrodes and pixel-use TFTs are arranged in a matrix array; and
a driver circuit which includes a driver circuit-use TFT and is formed on a periphery of the display region, wherein
the pixel-use TFT is a bottom-gate-type TFT in which an active layer is formed of an a-Si layer,
the driver circuit-use TFT is a bottom-gate-type TFT in which an active layer is formed by stacking a poly-Si layer and an a-Si layer in order of the poly-Si layer and the a-Si layer, an n+Si layer is formed so as to cover the a-Si layer and the poly-Si layer, and an SD electrode is formed so as to cover the n+Si layer, and
a side of the poly-Si layer which is brought into contact with the n+Si layer assumes a corrugated concavo-convex shape.
5. A liquid crystal display device according to claim 4 , wherein a depth of the concavo-convex shape in a corrugated shape is set to 0.5 μm or more.
6. A liquid crystal display device according to claim 4 , wherein the corrugated concavo-convex shape comprises at least two different depths.