IP Library Granted Patent US 8,389,396
Granted Patent B2
US 8,389,396 · App. 13/233,402 · Granted Mar 5, 2013

Method for manufacture of integrated circuit package system with protected conductive layers for pads

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Quick Facts
Patent No.
US 8,389,396
App. No.
13/233,402
Filed
Sep 15, 2011
Granted
Mar 5, 2013
Kind
B2
Art Unit
2894
USPC
438/612
Abstract

A method for manufacture of an integrated circuit package system includes: providing an integrated circuit die having a contact pad; forming a protection cover over the contact pad; forming a passivation layer having a first opening over the protection cover with the first opening exposing the protection cover; developing a conductive layer over the passivation layer; forming a pad opening in the protection cover for exposing the contact pad having the conductive layer partially removed; and an interconnect directly on the contact pad and only adjacent to the protection cover and the passivation layer.

Claims (23)

1. A method for manufacture of an integrated circuit package system comprising:

providing an integrated circuit die having a contact pad;

forming a protection cover over the contact pad;

forming a passivation layer having a first opening over the protection cover with the first opening exposing the protection cover;

developing a conductive layer over the passivation layer;

forming a pad opening in the protection cover for exposing the contact pad having the conductive layer partially removed; and

forming an interconnect directly on the contact pad and only adjacent to the protection cover and the passivation layer.

2. The method as claimed in claim 1 further comprising forming a circuit element over the integrated circuit die.

3. The method as claimed in claim 1 wherein forming the pad opening in the protection cover includes providing the protection cover having a higher etching selectivity compared to the passivation layer.

4. The method as claimed in claim 1 wherein forming the protection cover over the contact pad includes protecting the contact pad from chemicals used for developing the conductive layer.

5. The method as claimed in claim 1 further comprising forming an interconnect over the conductive layer and the contact pad exposed in the pad opening.

6. A method for manufacture of an integrated circuit package system comprising:

providing an integrated circuit die having a contact pad;

forming a protection cover over the contact pad;

forming a passivation layer having a first opening over the protection cover with the first opening exposing the protection cover;

developing a conductive layer over the passivation layer with the protection cover protecting the contact pad from chemicals used for developing the conductive layer;

forming a first interconnect over the conductive layer;

forming a pad opening in the protection cover for exposing the contact pad; and

forming a second interconnect directly on the contact pad and only adjacent to the protection cover and the passivation layer.

7. The method as claimed in claim 6 wherein forming the protection cover over the contact pad includes forming the protection cover comprised of a resistive layer having a lower etching selectivity than the conductive layer.

8. The method as claimed in claim 6 wherein forming the protection cover over the contact pad includes forming the protection cover comprised of an insulator layer having a lower etching selectivity than the conductive layer.

9. The method as claimed in claim 6 wherein forming the pad opening in the protection cover includes the protection cover having a higher etching selectivity than the passivation layer.

10. The method as claimed in claim 6 wherein developing the conductive layer includes etching the conductive layer.