System and method for improving mesa width in a semiconductor device
View Patent ↗A method for forming a memory device is provided. A nitride layer is formed over a substrate. The nitride layer and the substrate are etched to form a trench. The nitride layer is trimmed on opposite sides of the trench to widen the trench within the nitride layer. The trench is filled with an oxide material. The nitride layer is stripped from the memory device, forming a mesa above the trench.
1. An apparatus comprising:
a substrate comprising at least one isolation trench and a periphery trench formed therein,
the at least one isolation trench being a core trench;
a liner oxide formed over a sidewall of the at least one isolation trench,
the liner oxide comprising a first liner oxide formed over the sidewall of the core trench;
a tunnel oxide formed over the substrate;
an oxide material formed in the at least one isolation trench and including a portion extending above an upper surface of the tunnel oxide,
the portion extending above the upper surface of the tunnel oxide forming a first mesa that extends over the liner oxide and has a width of at least 35 nm;
a second liner oxide formed over a sidewall of the periphery trench,
the first mesa extending over the first liner oxide formed over the sidewall of the core trench,
a second mesa not extending over the second liner oxide formed over the sidewall of the periphery trench, and
the second mesa being formed above the periphery trench and being narrower than the first mesa;
a floating gate formed over the tunnel oxide and the first mesa,
the floating gate extending across an entire length of an upper surface of the first mesa; and
a control gate formed over the floating gate.
2. The apparatus of claim 1 , where the oxide material is a high density plasma (HDP) field oxide material.
3. The apparatus of claim 1 , where the sidewall of the at least one isolation trench is separated from a sidewall of another isolation trench, formed in the substrate, by 0.075 μm.
4. The apparatus of claim 1 , where the liner oxide includes a silicon oxide comprising a thickness ranging from 50 Å to 100 Å.
5. The apparatus of claim 1 , where the tunnel oxide includes a silicon oxide comprising a thickness ranging from 50 Å to 110 Å.
6. The apparatus of claim 1 , where the floating gate comprises a thickness ranging from 400 Å to 900 Å.
7. An apparatus comprising:
a substrate comprising a core trench and a periphery trench,
the core trench and the periphery trench being formed in the substrate;
a first liner oxide formed over a sidewall of the core trench;
a second liner oxide formed over a sidewall of the periphery trench;
a tunnel oxide formed over the substrate;
a first oxide material formed in the core trench,
the first oxide material including a first portion that extends above an upper surface of the tunnel oxide, and
the first portion forming a first mesa that extends over the first liner oxide and has a width of at least 35 nm;
a second oxide material formed over a sidewall of the periphery trench,
the second oxide material including a second portion that extends above the upper surface of the tunnel oxide,
the second portion forming a second mesa that is narrower than the first mesa, and
the second mesa not extending over the second liner oxide formed over the sidewall of the periphery trench;
a floating gate formed over the tunnel oxide and the first mesa,
the floating gate extending across an upper surface of the first mesa; and
a control gate formed over the floating gate.
8. The apparatus of claim 7 , where the first oxide material is a high density plasma (HDP) field oxide material.
9. The apparatus of claim 7 , where a sidewall of the core trench is separated from a sidewall of another core trench, formed in the substrate, by 0.075 μm.
10. The apparatus of claim 7 , where the first liner oxide includes a silicon oxide comprising a thickness ranging from 50 Å to 100 Å.
11. The apparatus of claim 7 , where the tunnel oxide includes a silicon oxide comprising a thickness ranging from 50 Å to 110 Å.
12. The apparatus of claim 7 , where the floating gate comprises a thickness ranging from 400 Å to 900 Å.
13. The apparatus of claim 1 , where
the at least one isolation trench includes two isolation trenches,
each of the two isolation trenches are core trenches, and
the core trench corresponds to a first core trench of the core trenches.
14. The apparatus of claim 13 , further comprising:
a third mesa extending over the first liner oxide formed over a sidewall of a second core trench of the core trenches.
15. The apparatus of claim 14 , where the floating gate is formed over the tunnel oxide and the third mesa.
16. The apparatus of claim 14 , where the second mesa is narrower than the third mesa.
17. The apparatus of claim 7 , where
the at least one isolation trench includes two isolation trenches,
each of the two isolation trenches are core trenches, and
the core trench corresponds to a first core trench of the core trenches.
18. The apparatus of claim 17 , further comprising:
a third mesa extending over the first liner oxide formed over a sidewall of a second core trench of the core trenches.
19. The apparatus of claim 18 , where the floating gate is formed over the tunnel oxide and the third mesa.
20. The apparatus of claim 18 , where the second mesa is narrower than the third mesa.