Method for manufacturing semiconductor device
View Patent ↗A method for manufacturing a semiconductor device includes forming a first-conductivity-type well and a second-conductivity-type well in a silicon substrate; stacking a first high-dielectric-constant insulating film and a first cap dielectric film above the silicon substrate; removing at least the first cap dielectric film from above the second-conductivity-type well; conducting a first annealing at a first temperature to cause an element included in the first cap dielectric film to diffuse into the first high-dielectric-constant insulating film disposed above the first-conductivity-type well; after the first annealing, stacking a second high-dielectric-constant insulating film and a second cap dielectric film above the silicon substrate; removing the second cap dielectric film disposed above the first-conductivity-type well; and conducting a second annealing at a second temperature lower than the first temperature to cause an element included in the second cap dielectric film to diffuse into the second high-dielectric-constant insulating film disposed above the second-conductivity-type well.
1. A method for manufacturing a semiconductor device comprising:
forming a first-conductivity-type well of a first conductivity type and a second-conductivity-type well of a conductivity type opposite to the first conductivity type in a silicon substrate;
stacking a first high-dielectric-constant insulating film above the silicon substrate;
stacking a first cap dielectric film above the first high-dielectric-constant insulating film;
removing the first cap dielectric film and first high-dielectric-constant insulating film above the second-conductivity-type well
stacking a second high-dielectric-constant insulating film and a second cap dielectric film above the silicon substrate so as to cover the first high-dielectric-constant insulating film and first cap dielectric film;
removing the second cap dielectric film disposed above the first-conductivity-type well; and
after removing the second cap dielectric film disposed above the first-conductive-type well, conducting a heat treatment in a nitriding gas atmosphere to fix nitrogen in the second cap dielectric film above the second-conductivity-type well, and to cause an element included in the first cap dielectric film to diffuse into the first high-dielectric-constant insulating film disposed above the first-conductivity-type well.
2. The method according to claim 1 , further comprising:
prior to stacking the second high-dielectric-constant insulating film and the second cap dielectric film, conducting a first annealing at a first temperature to cause an element included in the first cap dielectric film to diffuse into the first high-dielectric-constant insulating film disposed above the first-conductivity-type well.