Semiconductor device manufacturing method
View Patent ↗A semiconductor device comprises a conductor film and a capacitor comprising a lower electrode provided on the conductor film. The conductor film includes a first conductive film containing a first metal, a second conductive film containing a second metal on the first conductive film, and an oxide film of the second metal on the second conductive film. The oxide film of the second metal has a lower electric resistivity than an oxide film of the first metal.
1. A method for manufacturing a semiconductor device, comprising:
forming a conductor which includes a first conductive film containing a first metal, a second conductive film containing a second metal on the first conductive film, and an oxide film of the second metal on the second conductive film; and
forming a capacitor comprising a lower electrode provided on the conductor, wherein
the first conductive film and the second conductive film are configured such that the oxide film of the second metal has a lower electric resistivity than an oxide film of the first metal would have, if the first conductive film were oxidized to form an oxide film of the first metal.
2. The method according to claim 1 , wherein the second metal is at least one type of metal selected from the group consisting of molybdenum (Mo), cobalt (Co), ruthenium (Ru), chromium (Cr), and manganese (Mn).
3. The method according to claim 1 , wherein the first metal is tungsten.
4. The method according to claim 1 , wherein the oxide film of the second metal has the electric resistivity of 1,000 μΩ·cm or less.
5. The method according to claim 1 , wherein the lower electrode contains at least one type of oxide film selected from the group consisting of molybdenum dioxide (MoO 2 ), manganese dioxide (MnO 2 ), chromium dioxide (CrO 2 ), cobalt dioxide (CoO 2 ), and ruthenium dioxide (RuO 2 ).
6. The method according to claim 1 , wherein the capacitor comprises a capacitive insulating film formed on the lower electrode.
7. The method according to claim 6 , wherein the capacitive insulating film contains titanium dioxide.
8. The method according to claim 6 , wherein the capacitor includes an upper electrode formed on the capacitive insulating film, the upper electrode containing at least one type of oxide film selected from the group consisting of molybdenum dioxide (MoO 2 ), manganese dioxide (MnO 2 ), chromium dioxide (CrO 2 ), cobalt dioxide (CoO 2 ), and ruthenium dioxide (RuO 2 ).
9. The method according to claim 8 , further comprising: forming a contact plug connected to the conductor; and forming a transistor including a diffusion layer connected to the contact plug.
10. The method according to claim 1 , wherein the second conductive film has a film thickness of 2 nm or more and 20 nm or less.
11. The method according to claim 1 , wherein the oxide film of the second metal has a film thickness of 1 nm or more and 5 nm or less.
12. The method according to claim 1 , further comprising forming a diffusion preventing film under the first conductive film.
13. The method according to claim 12 , wherein the diffusion preventing film contains tungsten nitride.
14. A method for manufacturing a semiconductor device, comprising:
forming a first conductive film containing a first metal;
forming a second conductive film containing a second metal on the first conductive film;
forming an oxide film of the second metal on a surface of the second conductive film; and
forming a third conductive film on the oxide film of the second metal, wherein
the first conductive film and the second conductive film are configured such that the oxide film of the second metal has a lower electric resistivity than an oxide film of the first metal would have, if the first conductive film were oxidized to form an oxide film of the first metal.
15. The method according to claim 14 , wherein the first metal is tungsten.
16. The method according to claim 14 , wherein the second metal is at least one type of metal selected from the group consisting of molybdenum (Mo), cobalt (Co), ruthenium (Ru), chromium (Cr), and manganese (Mn).
17. The method according to claim 14 , wherein the oxide film of the second metal has the electric resistivity of 1,000 μΩ·cm or less.
18. The method according to claim 14 , wherein the second conductive film has a film thickness of 2 nm or more and 20 nm or less.
19. The method according to claim 14 , wherein the oxide film of the second metal has a film thickness of 1 nm or more and 5 nm or less.
20. The method according to claim 14 , further comprising forming a diffusion preventing film under the first conductive film.