Micro defects in semi-conductors
View Patent ↗The invention relates to a method and apparatus for detecting defects in a semiconductor or silicon structure at room temperature, and in an efficient time, using photoluminescence. The invention employs the use of a high intensity beam of light preferably having a spot size between 0.1 mm–0.5 microns and a peak or average power density of 10 4 –10 9 w/cm 2 with a view to generating a high concentration of charge carriers, which charge characters detect defects in a semiconductor by interacting with same. These defects are visible by producing a photoluminescence image of the semiconductor. Several wavelengths may be selected to identify defects at a selective depth as well as confocal optics may be used.
1. A method for identifying defects in a silicon structure comprising exposing said silicon structure to at least one high intensity beam of light characterised by a spot size of between 0.1 mm–0.5 microns and a peak or average power density of between 10 4 –10 9 watts/cm 2 ; and collecting luminescence from the silicon structure so as to visualize and observe defects in same by production of an image, characterized in that non-radiative recombination of electron pairs is detected as darkened regions in the image at the physical point of the defect.
2. A method according to claim 1 comprising selecting the wavelength of said light so as to identify defects at a selective depth in said silicon structure.
3. A method according to claim 1 wherein the high intensity beam of light is pulsed.
4. A method according to claim 1 comprising collecting luminescence from a series of focal planes.
5. An apparatus for undertaking photoluminescence imaging of a silicon structure characterised in that it comprises at least one high intensity light generating means which produces a beam of light having a spot size between 0.1 mm–0.5 microns and a peak or average power density of between 10 4 –10 9 watts/cm 2 ; a means for collecting luminescence from the silicon structure and means for producing photoluminescence images of said silicon structure in the form of an image so as to visualize and observe any defects that may be present, characterized in that means for collecting photoluminescence enable detection of non-radiative recombination of electron pairs, as darkened regions in the image at the physical point of the defect.
6. An apparatus according to claim 5 wherein said light generating means is provided with modulation means whereby the wavelength of said light beam can be selected.
7. An apparatus according to claim 5 wherein said light generating means is provided with modulation means whereby the intensity of said light beam is selected.
8. Apparatus according to claim 5 wherein means is provided to enable the high intensity beam of light to be pulsed.
9. Apparatus according to claim 5 wherein said light generating means is provided with modulation means whereby the frequency of said light beam is selected.
10. Apparatus according to claim 5 wherein said apparatus comprises confocal optics whereby images of said silicon structure is obtained through a series of focal planes.
11. A method for identifying defects in a semiconductor other than a silicon structure (non-silicon semiconductor) comprising exposing said semiconductor to at least one high intensity beam of light characterized by a spot size of between 0.1 mm–0.5 microns and a peak or average power density of between 10 4 –10 9 watts/cm 2 ; and collecting luminescence from the semiconductor so as to visualize and observe defects in same by production of an image, characterized in that non-radiative recombination of electron pairs is detected as darkened regions in the image at the physical position of the defect.
12. A method according to claim 11 comprising selecting the wavelength of said light so as to identify defects at a selective depth in said semiconductor.
13. A method according to claim 11 wherein the high intensity beam of light is pulsed.
14. A method according to claim 11 comprising collecting luminescence from a series of focal planes.
15. An apparatus for undertaking photoluminescence imaging of a semiconductor other than a silicon structure (non-silicon semiconductor) characterised in that it comprises at least one high intensity light generating means which produces a beam of light having a spot size between 0.1 mm–0.5 microns and a peak or average power density of between 10 4 –10 9 watts/cm 2 ; a means for collecting luminescence from said semiconductor, and means for producing photoluminescence images of said semiconductor in the form of an image so as to visualize and observe any defects that may be present, characterized in that means for collecting photoluminescence enable detection of non-radiative recombination of electron pairs, as darkened regions in the image at the physical point of the defect.
16. An apparatus according to claim 15 wherein said light generating means is provided with modulation means whereby the wavelength of said light beam can be selected.
17. An apparatus according to claim 15 wherein said light generating means is provided with modulation means whereby the intensity of said light beam is selected.
18. An apparatus according to claim 15 wherein means is provided to enable the high intensity beam of light to be pulsed.
19. An apparatus according to claim 15 wherein said light generating means is provided with modulation means whereby the frequency of said light beam is selected.
20. An apparatus according to claim 15 wherein said apparatus comprises confocal optics whereby images of said semiconductor is obtained through a series of focal planes.