Method for minimizing corner effect by densifying the insulating layer
View Patent ↗The invention concerns a method for minimizing “corner” effects in shallow silicon oxide trenches, by densifying the silicon oxide layer after it has been deposited in the trenches. Said densification is preferably carried out by irradiating the layer under luminous radiation with weak wavelength.
1. A method, comprising:
forming a thin layer of thermal silicon oxide along the walls of an active area of a semiconductor device and forming a thin layer of thermal silicon oxide along the walls and bottoms of shallow trenches laterally adjacent to the active area;
depositing silicon oxide into the shallow trenches;
irradiating the silicon oxide in the shallow trenches with short wavelength light to densify the silicon oxide;
forming a thin oxide gate layer on the active area; and
depositing a gate onto the thin oxide gate layer, wherein the gate overlaps the shallow trenches.
2. The method of claim 1 , further comprising irradiating the silicon oxide in the shallow trenches with light at a wavelength less than or equal to 200 nm, with a number of photons per cm 2 greater than 10 19 , and an energy at least equal to 9 eV.
3. The method of claim 1 , wherein the wavelength of the light is approximately 100 nm.
4. The method of claim 1 , wherein irradiating the silicon oxide inhibits the formation of corner areas in the active areas.
5. The method of claim 1 , further comprising irradiating the silicon oxide in the shallow trenches such that the silicon oxide in the shallow trenches has a density close to the density of the thermal silicon oxide.
6. The method of claim 1 , wherein the silicon oxide layer is deposited in the trenches using a chemical vapor deposition (CVD) process.