Structure and method for forming a multilayer electrode for a flat panel display device
View Patent ↗A structure for a multilayer electrode. Specifically, in one embodiment, a multilayer electrode for a flat panel display device is disclosed. The multilayer electrode comprises a metal alloy layer and a protective layer. The metal alloy layer includes neodymium having a concentration of between greater than three atomic percent and six atomic percent. The protective layer is disposed above the metal alloy layer to form a multilayer stack. The multilayer stack is etched to form the multilayer electrode.
1. A multilayer electrode for a flat panel display device, said multilayer electrode comprising:
a metal alloy layer, wherein said metal alloy layer includes neodymium having a concentration of between greater than three atomic percent and six atomic percent; and
a protective layer disposed above said metal alloy layer to form a multilayer stack, said multilayer stack etched to form said multilayer electrode, wherein said protective layer includes an molybdenum tungsten alloy.
2. The multilayer electrode for a flat panel display device as recited in claim 1 , wherein said metal alloy layer is comprised of aluminum and neodymium.
3. The multilayer electrode for a flat panel display device as recited in claim 1 , wherein said metal alloy layer has a depth of approximately 2500 angstroms.
4. The multilayer electrode for a flat panel display device as recited in claim 1 , wherein said molybdenum tungsten alloy in said protective layer includes a tungsten concentration of 5 to 30 atomic percent.
5. The multilayer electrode for a flat panel display device as recited in claim 1 , wherein said protective layer has a depth of approximately 1200 angstroms.
6. A multilayer electrode for a flat panel display device, said multilayer electrode comprising:
a metal alloy layer, wherein said metal alloy layer includes neodymium having a concentration of between greater than three atomic percent and six atomic percent;
a barrier layer disposed above said metal alloy layer; and
a protective layer disposed above said metal alloy layer to form a multilayer stack, said multilayer stack etched to form said multilayer electrode, wherein said protective layer includes an molybdenum tungsten alloy.
7. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said metal alloy layer is comprised of aluminum and neodymium.
8. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said metal alloy layer has a depth of approximately 2500 angstroms.
9. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said barrier layer is comprised of a native oxide layer of said metal alloy layer.
10. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said barrier layer has a depth of less than approximately 100 angstroms.
11. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said molybdenum tungsten alloy in said protective layer includes a tungsten concentration of 5 to 30 atomic percent.
12. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said protective layer has a depth of approximately 1200 angstroms.
13. The multilayer electrode for a flat panel display device as recited in claim 6 , wherein said multilayer electrode is etched using a wet etchant with volume percentages of constituents of approximately 70-80 percent H 3 PO 4 ; approximately 10-15 percent HNO 3 ; approximately 7-12 percent CH 3 COOH; and approximately 2-8 percent H 2 O to form a desired sloped profile.