IP Library Granted Patent US 6,397,776
Granted Patent Utility
US 6,397,776 · Confirmation No. 6875

APPARATUS AND METHOD FOR LARGE AREA CHEMICAL VAPOR DEPOSITION USING MULTIPLE EXPANDING THERMAL PLASMA GENERATORS

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Code Description Pages PDF
2014-03-17 OATH Oath or Declaration filed 135 View
2001-06-11 TRNA Transmittal of New Application 8 View
2001-06-11 ADS Application Data Sheet 3 View
2001-06-11 SPEC Specification 18 View
2001-06-11 CLM Claims 5 View
2001-06-11 ABST Abstract 1 View
2001-06-11 DRW Drawings-only black and white line drawings 11 View
2001-06-11 TRNA Transmittal of New Application 8 View
2001-06-11 ADS Application Data Sheet 3 View
2001-06-11 SPEC Specification 18 View
2001-06-11 CLM Claims 5 View
2001-06-11 ABST Abstract 1 View
2001-06-11 DRW Drawings-only black and white line drawings 11 View
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Quick Facts
Patent No.
US 6,397,776
App. No.
09/681,820
Filed
2001-06-11
Granted
2002-06-04
Art Unit
1763
PTA
0 days