Method for homogenizing the exposure of the different beams in a multi beam plotter

1. A method for homogenizing the exposure of different beams in a multi-beam plotter, comprising the steps of:

creating digital data of a calibration pattern, said digital data comprise columns in an exposure direction and rows in a second direction, generally perpendicular to said exposure direction, wherein each of said rows comprises data to be exposed by one of said beams; and

using said plotter to expose said digital data on a substrate to create said calibration pattern,

wherein, following each exposure cycle by said beams moving in the exposure direction relative to said substrate, said beams move in the second direction, a distance smaller than the sum of the widths covered by said beams.

2. A method according to claim 1 , wherein said step of creating comprises creating digital data wherein each column comprises a number of consecutive data elements, said number being equal to the number of said beams.

3. A method according to claim 1 , wherein said distance traversed by said beams in said second direction is equal to the width of one column covered by each one of said beams.

4. The method according to claim 1 , wherein said plotter is an imagesetter.

5. The method of claim 1 , wherein said plotter is a platesetter.

6. The method of claim 1 , wherein said plotter is a drum plotter.

7. The method of claim 1 , wherein said plotter is a flatbed plotter.

8. The method of claim 1 further comprising:

determining the calibration of the light intensity of said beams based on said calibration pattern.

9. The method of claim 1 , wherein each of said rows is constructed of one-pixel width columns comprising data-columns and non-data-columns and the distance between two adjacent data-columns in each of said rows equals the number of said beams.