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	Code	Description	Pages	PDF
2003-09-29	`IFEE`	Issue Fee Payment (PTO-85B)	1	View
2003-09-29	`C680`	Request for Corrected Notice of Allowance	1	View
2003-07-15	`LET.`	Miscellaneous Incoming Letter	1	View
2001-01-05	`TRNA`	Transmittal of New Application	3	View
2001-01-05	`A.PE`	Preliminary Amendment	3	View
2001-01-05	`SPEC`	Specification	54	View
2001-01-05	`CLM`	Claims	13	View
2001-01-05	`ABST`	Abstract	1	View
2001-01-05	`DRW`	Drawings-only black and white line drawings	11	View
2001-01-05	`OATH`	Oath or Declaration filed	5	View

Inventors

Yoshio Kawamura Kokubunji, JAPAN

Kan Yasui Kokubunji, JAPAN

Masahiko Sato Kumagaya, JAPAN

Souichi Katagiri Kodaira, JAPAN

Masayuki Nagasawa Kawagoe, JAPAN

Kunio Harada Hachioji, JAPAN

Satoshi Osabe Higashimurayama, JAPAN

Ui Yamaguchi Urawa, JAPAN

Attorneys & Agents of Record

JOHN MATTINGLY Reg. 30293 Attorney · MATTINGLY & MALUR, P.C.

NICHOLAS MATTINGLY Reg. 62484 Agent · MATTINGLY & MALUR, P.C.

SHRINATH MALUR Reg. 34663 Attorney · MATTINGLY & MALUR, P.C.

DOUGLAS HANSCOM Reg. 26600 Attorney · MATTINGLY & MALUR, PC

COLIN BARNITZ Reg. 35061 Attorney · MATTINGLY & MALUR, P.C.

Classification

USPC 451/41

H10P52/00 B24B37/32 H10P52/403 H10P95/062

Prosecution

Foreign Priority

2000-005866 · 2000-01-07 · JAPAN

Publication

Patent Term Adjustment

0days

RENESAS ELECTRONICS CORPORATION

from RENESAS ELECTRONICS CORPORATION

CHANGE OF ADDRESS Recorded 2017-11-29

RENESAS ELECTRONICS CORPORATION

from RENESAS TECHNOLOGY CORP.

MERGER AND CHANGE OF NAME Recorded 2011-05-17

RENESAS TECHNOLOGY CORPORATION

from HITACHI, LTD.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2003-10-15

HITACHI, LTD.

from SATO, MASAHIKO, KATIGIRI, SOUICHI, KAWAMURA, YOSHIO, YAMAGUCHI, UI, HARADA, KUNIO, NAGASAWA, MASAYUKI, OSABE, SATOSHI, YASUI, KAN

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2002-10-02

METHOD FOR POLISHING SURFACE OF SEMICON-DUCTOR DEVICE SUBSTRATE