IP Library Granted Patent US 6,410,361
Granted Patent Utility Small
US 6,410,361 · Confirmation No. 5281

METHODS OF FABRICATING IN-PLANE MEMS THERMAL ACTUATORS

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Code Description Pages PDF
2001-02-06 TRNA Transmittal of New Application 2 View
2001-02-06 A.PE Preliminary Amendment 1 View
2001-02-06 SPEC Specification 16 View
2001-02-06 CLM Claims 8 View
2001-02-06 ABST Abstract 1 View
2001-02-06 DRW Drawings-only black and white line drawings 9 View
2001-02-06 OATH Oath or Declaration filed 3 View
2001-02-06 TRNA Transmittal of New Application 2 View
2001-02-06 A.PE Preliminary Amendment 1 View
2001-02-06 SPEC Specification 16 View
2001-02-06 CLM Claims 8 View
2001-02-06 ABST Abstract 1 View
2001-02-06 DRW Drawings-only black and white line drawings 9 View
2001-02-06 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,410,361
App. No.
09/777,749
Filed
2001-02-06
Granted
2002-06-25
Pub. No.
US20010008357A1
Art Unit
2812
PTA
-50 days