IP Library › Granted Patent US 6,627,464
Granted Patent Utility
US 6,627,464 · Confirmation No. 3408

ADAPTIVE PLASMA CHARACTERIZATION SYSTEM

Inventor: David J. Coumou
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2003-05-27 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-05-27 LET. Miscellaneous Incoming Letter 3 View
2001-02-07 TRNA Transmittal of New Application 2 View
2001-02-07 ADS Application Data Sheet 1 View
2001-02-07 SPEC Specification 16 View
2001-02-07 CLM Claims 7 View
2001-02-07 ABST Abstract 1 View
2001-02-07 DRW Drawings-only black and white line drawings 9 View
2001-02-07 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,627,464
App. No.
09/778,453
Filed
2001-02-07
Granted
2003-09-30
Pub. No.
US20020132479A1
Art Unit
1765
PTA
-36 days