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App. No. 09/782,382 · Confirmation No. 9577

CONDUCTING ELECTRON BEAM RESIST THIN FILM LAYER FOR PATTERNING OF MASK PLATES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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 Code Description Pages PDF
2001-02-12 TRNA Transmittal of New Application 3 View
2001-02-12 SPEC Specification 9 View
2001-02-12 CLM Claims 5 View
2001-02-12 ABST Abstract 1 View
2001-02-12 DRW Drawings-only black and white line drawings 3 View
2001-02-12 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/782,382
Filed
2001-02-12
Granted
2002-11-19
Art Unit
1756
PTA
0 days