IP Library Patent Application 09782394
Patent Application Utility
App. No. 09/782,394 · Confirmation No. 9591

DEEP REACTIVE ION ETCHING PROCESS AND MICROELECTROMECHANICAL DEVICES FORMED THEREBY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2001-02-14 TRNA Transmittal of New Application 1 View
2001-02-14 SPEC Specification 17 View
2001-02-14 CLM Claims 7 View
2001-02-14 ABST Abstract 1 View
2001-02-14 DRW Drawings-only black and white line drawings 4 View
2001-02-14 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/782,394
Filed
2001-02-14
Granted
2002-12-31
Pub. No.
US20020111031A1
Art Unit
1765
PTA
0 days