Patent Application
Utility
App. No. 09/782,394
· Confirmation No. 9591
DEEP REACTIVE ION ETCHING PROCESS AND MICROELECTROMECHANICAL DEVICES FORMED THEREBY
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-02-14 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-02-14 | SPEC |
Specification | 17 | View | |
| 2001-02-14 | CLM |
Claims | 7 | View | |
| 2001-02-14 | ABST |
Abstract | 1 | View | |
| 2001-02-14 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-14 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Troy A. Chase
Kokomo, IN
John C. Christenson
Kokomo, IN
Attorneys & Agents of Record
Classification
USPC
216/2
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Docket No.
- DP-301010
- Confirmation No.
- 9591
Publication
- Pub. No.
- US20020111031A1
- Pub. Date
- 2002-08-15
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-10-02
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-02-14
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Quick Facts
- App. No.
- 09/782,394
- Filed
- 2001-02-14
- Granted
- 2002-12-31
- Pub. No.
- US20020111031A1
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- PTA
- 0 days
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