IP Library › Granted Patent US 6,593,208
Granted Patent Utility
US 6,593,208 · Confirmation No. 2197

METHOD OF UNIFORM POLISH IN SHALLOW TRENCH ISOLATION PROCESS

Inventor: Bo Jin
Patented Case View Patent ↗
⬇ PDF
 Code Description Pages PDF
2001-02-14 TRNA Transmittal of New Application 3 View
2001-02-14 SPEC Specification 7 View
2001-02-14 CLM Claims 4 View
2001-02-14 ABST Abstract 1 View
2001-02-14 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
Patent No.
US 6,593,208
App. No.
09/783,716
Filed
2001-02-14
Granted
2003-07-15
Art Unit
2813
PTA
-192 days