Granted Patent
Utility
US 6,656,643
· Confirmation No. 4175
METHOD OF EXTREME ULTRAVIOLET MASK ENGINEERING
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-08 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-02-20 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-02-20 | SPEC |
Specification | 11 | View | |
| 2001-02-20 | CLM |
Claims | 3 | View | |
| 2001-02-20 | ABST |
Abstract | 1 | View | |
| 2001-02-20 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-02-20 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Subhash Gupta
Singapore, SINGAPORE
Mei Sheng Zhou
Singapore, SINGAPORE
Attorneys & Agents of Record
Classification
USPC
430/5
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Customer No.
- 28112
- Docket No.
- CS99-241
- Confirmation No.
- 4175
Publication
- Pub. No.
- US20020115000A1
- Pub. Date
- 2002-08-22
Patent Term Adjustment
-10days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-02-20
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Quick Facts
- Patent No.
- US 6,656,643
- App. No.
- 09/785,116
- Filed
- 2001-02-20
- Granted
- 2003-12-02
- Pub. No.
- US20020115000A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- -10 days
External Links