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App. No. 09/785,815 · Confirmation No. 4127

Integrated semiconductor substrate bevel cleaning apparatus and method

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2005-04-01 ABN Abandonment 2 View
2004-12-14 FOR Foreign Reference 28 View
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2004-12-14 FOR Foreign Reference 32 View
2004-12-14 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-12-13 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-11-08 CTAV Advisory Action (PTOL-303) 3 View
2004-11-08 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-10-15 A.NE Response After Final Action 2 View
2004-10-15 CLM Claims 3 View
2004-10-15 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-10-15 WFEE Fee Worksheet (SB06) 2 View
2004-08-18 CTFR Final Rejection 7 View
2004-08-18 1449 List of References cited by applicant and considered by examiner 2 View
2004-08-18 BIB Bibliographic Data Sheet 1 View
2004-08-18 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-13 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-07-13 FOR Foreign Reference 76 View
2004-07-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-07-12 SPEC Specification 1 View
2004-07-12 CLM Claims 5 View
2004-07-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-04-13 CTNF Non-Final Rejection 6 View
2004-04-13 892 List of references cited by examiner 1 View
2004-04-13 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-04-07 WFEE Fee Worksheet (SB06) 2 View
2004-04-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-04-07 CLM Claims 5 View
2004-04-07 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-03-08 A.NE Response After Final Action 2 View
2004-03-08 CLM Claims 4 View
2004-03-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-01-07 CTFR Final Rejection 6 View
2004-01-07 892 List of references cited by examiner 1 View
2004-01-07 LET. Miscellaneous Incoming Letter 1 View
2004-01-07 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-17 SRNT Examiner's search strategy and results 1 View
2003-08-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-08-27 SPEC Specification 1 View
2003-08-27 CLM Claims 5 View
2003-08-27 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-08-27 LET. Miscellaneous Incoming Letter 1 View
2003-08-01 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-07-11 PETDEC Petition Decision 3 View
2003-06-30 LET. Miscellaneous Incoming Letter 1 View
2003-06-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-06-30 SPEC Specification 1 View
2003-06-30 CLM Claims 5 View
2003-06-30 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-06-30 PET. Petition Entered 2 View
2003-06-30 XT/ Extension of Time 1 View
2003-06-30 WFEE Fee Worksheet (SB06) 2 View
2003-02-26 CTNF Non-Final Rejection 8 View
2003-02-26 892 List of references cited by examiner 1 View
2003-02-26 1449 List of References cited by applicant and considered by examiner 1 View
2003-02-20 SRNT Examiner's search strategy and results 1 View
2002-09-05 C.AD Change of Address 1 View
2002-08-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-08-12 371P Documents submitted with 371 (National Stage) Applications 5 View
2002-08-12 FOR Foreign Reference 16 View
2002-08-12 FOR Foreign Reference 90 View
2001-07-16 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-07-16 1449 List of References cited by applicant and considered by examiner 6 View
2001-07-16 FOR Foreign Reference 33 View
2001-07-16 FOR Foreign Reference 25 View
2001-07-16 FOR Foreign Reference 48 View
2001-07-16 FOR Foreign Reference 133 View
2001-07-16 FOR Foreign Reference 28 View
2001-07-16 FOR Foreign Reference 1 View
2001-07-16 FOR Foreign Reference 1 View
2001-07-16 FOR Foreign Reference 1 View
2001-07-16 FOR Foreign Reference 1 View
2001-07-16 FOR Foreign Reference 1 View
2001-07-16 FOR Foreign Reference 1 View
2001-07-16 FOR Foreign Reference 3 View
2001-07-16 FOR Foreign Reference 34 View
2001-02-16 TRNA Transmittal of New Application 2 View
2001-02-16 SPEC Specification 17 View
2001-02-16 CLM Claims 4 View
2001-02-16 ABST Abstract 1 View
2001-02-16 DRW Drawings-only black and white line drawings 7 View
2001-02-16 OATH Oath or Declaration filed 4 View
2001-02-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-02-16 SRFW Search information including classification, databases and other search related notes 1 View
2001-02-16 FWCLM Index of Claims 1 View
2001-02-16 TRNA Transmittal of New Application 2 View
2001-02-16 SPEC Specification 17 View
2001-02-16 CLM Claims 4 View
2001-02-16 ABST Abstract 1 View
2001-02-16 DRW Drawings-only black and white line drawings 7 View
2001-02-16 OATH Oath or Declaration filed 4 View
2001-02-16 WCLM Claims Worksheet (PTO-2022) 1 View
2001-02-16 WFEE Fee Worksheet (SB06) 1 View
2001-02-16 WFEE Fee Worksheet (SB06) 1 View
2001-02-16 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
09/785,815
Filed
2001-02-16
Pub. No.
US20020113039A1
Art Unit
1763