IP Library › Granted Patent US 6,540,468
Granted Patent Utility PCT National Stage
US 6,540,468 · Confirmation No. 8097

DEVICE AND METHOD FOR HANDLING INDIVIDUAL WAFERS

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2019-02-28 PA.. Power of Attorney 3 View
2019-02-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-02-28 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2001-04-17 ABST Abstract 1 View
2001-04-17 LET. Miscellaneous Incoming Letter 31 View
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Quick Facts
Patent No.
US 6,540,468
App. No.
09/786,315
Filed
2001-04-17
Granted
2003-04-01
Art Unit
3652
PTA
0 days