IP Library Granted Patent US 6,411,490
Granted Patent Utility
US 6,411,490 · Confirmation No. 5525

INTEGRATED POWER MODULES FOR PLASMA PROCESSING SYSTEMS

Inventor: Robert D. Dible
⬇ PDF
Code Description Pages PDF
2013-11-13 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-02-23 TRNA Transmittal of New Application 4 View
2001-02-23 A.PE Preliminary Amendment 5 View
2001-02-23 SPEC Specification 17 View
2001-02-23 CLM Claims 11 View
2001-02-23 ABST Abstract 1 View
2001-02-23 DRW Drawings-only black and white line drawings 5 View
2001-02-23 OATH Oath or Declaration filed 3 View
2001-02-23 TRNA Transmittal of New Application 4 View
2001-02-23 A.PE Preliminary Amendment 5 View
2001-02-23 SPEC Specification 17 View
2001-02-23 CLM Claims 11 View
2001-02-23 ABST Abstract 1 View
2001-02-23 DRW Drawings-only black and white line drawings 5 View
2001-02-23 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,411,490
App. No.
09/792,478
Filed
2001-02-23
Granted
2002-06-25
Pub. No.
US20010014003A1
Art Unit
2836
PTA
-12 days