Patent Application
Utility
App. No. 09/797,323
· Confirmation No. 6754
Integrated circuit trench etch with incremental oxygen flow
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-02-27 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2006-11-13 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-03-01 | TRNA |
Transmittal of New Application | 8 | View | |
| 2001-03-01 | SPEC |
Specification | 5 | View | |
| 2001-03-01 | CLM |
Claims | 2 | View | |
| 2001-03-01 | ABST |
Abstract | 1 | View | |
| 2001-03-01 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-03-01 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Thomas E. Grebs
Mountaintop, PA
Joseph L. Cumbo
West Wyoming, PA
Attorneys & Agents of Record
Classification
USPC
257/243
H10D10/041
H10D30/025
H10W10/014
H10W10/17
H10P50/242
Prosecution
- Examiner
- MANDALA, MICHELLE
- Art Unit
- 2823
- Customer No.
- 112952
- Docket No.
- 87552.036801/SE-1657PD
- Confirmation No.
- 6754
Publication
- Pub. No.
- US20020160616A1
- Pub. Date
- 2002-10-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-08-03
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-17
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Quick Facts
- App. No.
- 09/797,323
- Filed
- 2001-03-01
- Pub. No.
- US20020160616A1
- Examiner
- MANDALA, MICHELLE
- Art Unit
- 2823
External Links