IP Library Granted Patent US 6,599,816
Granted Patent Utility
US 6,599,816 · Confirmation No. 5075

METHOD OF MANUFACTURING SILICON EPITAXIAL WAFER

⬇ PDF
Code Description Pages PDF
2001-03-08 TRNA Transmittal of New Application 3 View
2001-03-08 SPEC Specification 10 View
2001-03-08 CLM Claims 2 View
2001-03-08 ABST Abstract 1 View
2001-03-08 DRW Drawings-only black and white line drawings 2 View
2001-03-08 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,599,816
App. No.
09/800,514
Filed
2001-03-08
Granted
2003-07-29
Pub. No.
US20010021574A1
Art Unit
2823
PTA
-28 days