IP Library › Granted Patent US 6,473,237
Granted Patent Utility
US 6,473,237 · Confirmation No. 5302

POINT ARRAY MASKLESS LITHOGRAPHY

Inventor: Wenhui Mei
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-05-07 A.PE Preliminary Amendment 3 View
2001-05-07 DRW Drawings-only black and white line drawings 21 View
2001-03-08 TRNA Transmittal of New Application 3 View
2001-03-08 SPEC Specification 21 View
2001-03-08 CLM Claims 1 View
2001-03-08 ABST Abstract 1 View
2001-03-08 DRW Drawings-only black and white line drawings 21 View
2001-03-08 OATH Oath or Declaration filed 2 View
2001-03-08 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,473,237
App. No.
09/801,516
Filed
2001-03-08
Granted
2002-10-29
Pub. No.
US20020097495A1
Examiner
BEN, LOHA
Art Unit
2873
PTA
-113 days