IP Library › Granted Patent US 6,451,635
Granted Patent Utility
US 6,451,635 · Confirmation No. 7508

PHOTOLITHOGRAPHY SYSTEM AND A METHOD FOR FABRICATING A THIN FILM TRANSISTOR ARRAY SUBSTRATE USING THE SAME

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 Code Description Pages PDF
2001-03-13 TRNA Transmittal of New Application 3 View
2001-03-13 SPEC Specification 32 View
2001-03-13 CLM Claims 9 View
2001-03-13 ABST Abstract 1 View
2001-03-13 DRW Drawings-only black and white line drawings 40 View
2001-03-13 TRNA Transmittal of New Application 3 View
2001-03-13 SPEC Specification 32 View
2001-03-13 CLM Claims 9 View
2001-03-13 ABST Abstract 1 View
2001-03-13 DRW Drawings-only black and white line drawings 40 View
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Quick Facts
Patent No.
US 6,451,635
App. No.
09/804,056
Filed
2001-03-13
Granted
2002-09-17
Pub. No.
US20010041394A1
Art Unit
2813
PTA
0 days