Granted Patent
Utility
PCT National Stage
US 6,465,328
· Confirmation No. 3698
SEMICONDUCTOR WAFER MANUFACTURING METHOD
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-27 | LET. |
Miscellaneous Incoming Letter | 24 | View |
Inventors
Hashii Tomohiro
Imari-shi, JAPAN
Onizaki Kazunori
Kishima-gun, JAPAN
Masuda Sumihisa
Imari-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/459
H10P90/12
B24B1/00
B24B7/17
B24B9/065
B24B37/08
Y10S438/928
Prosecution
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- Docket No.
- 5446
- Confirmation No.
- 3698
Foreign Priority
10-279667
·
1998-10-01
·
JAPAN
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-07-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-19
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Quick Facts
- Patent No.
- US 6,465,328
- App. No.
- 09/806,199
- Filed
- 2001-03-27
- Granted
- 2002-10-15
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- PTA
- 0 days
External Links