IP Library › Patent Application 09806808
Patent Application Utility PCT National Stage
App. No. 09/806,808 · Confirmation No. 7764

METHOD OF FORMING A SION ANTIREFLECTION FILM WHICH IS NONCONTAMINATING WITH RESPECT TO DEEP-UV PHOTORESISTS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
⬇ PDF
 Code Description Pages PDF
2010-07-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-07-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-07-13 C.AD Change of Address 1 View
2010-07-13 PA.. Power of Attorney 2 View
2010-07-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-07-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2009-09-11 C.AD Change of Address 2 View
2009-09-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-11-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-11-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-11-04 PA.. Power of Attorney 1 View
2008-11-04 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2008-11-04 LET. Miscellaneous Incoming Letter 12 View
2008-11-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-07-18 LET. Miscellaneous Incoming Letter 29 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/806,808
Filed
2001-07-18
Granted
2003-03-04
Examiner
NHU, DAVID
Art Unit
2818
PTA
0 days