IP Library Granted Patent US 6,363,238
Granted Patent Utility
US 6,363,238 · Confirmation No. 5488

SUBSTRATE CONDITIONER SEAL USING DIFFERENTIAL AIR PRESSURE

Patented Case View Patent ↗
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Code Description Pages PDF
2001-03-16 TRNA Transmittal of New Application 3 View
2001-03-16 SPEC Specification 13 View
2001-03-16 CLM Claims 4 View
2001-03-16 ABST Abstract 1 View
2001-03-16 DRW Drawings-only black and white line drawings 4 View
2001-03-16 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,363,238
App. No.
09/808,772
Filed
2001-03-16
Granted
2002-03-26
Examiner
NGO, HOANG X
Art Unit
2852
PTA
-67 days