IP Library Granted Patent US 6,612,029
Granted Patent Utility
US 6,612,029 · Confirmation No. 6690

MULTI-LAYER, SELF-ALIGNED VERTICAL COMBDRIVE ELECTROSTATIC ACTUATORS AND FABRICATION METHODS

⬇ PDF
Code Description Pages PDF
2001-03-14 TRNA Transmittal of New Application 2 View
2001-03-14 SPEC Specification 24 View
2001-03-14 CLM Claims 3 View
2001-03-14 ABST Abstract 1 View
2001-03-14 DRW Drawings-only black and white line drawings 12 View
2001-03-14 TRNA Transmittal of New Application 2 View
2001-03-14 SPEC Specification 24 View
2001-03-14 CLM Claims 3 View
2001-03-14 ABST Abstract 1 View
2001-03-14 DRW Drawings-only black and white line drawings 12 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,612,029
App. No.
09/810,335
Filed
2001-03-14
Granted
2003-09-02
Pub. No.
US20010034938A1
Art Unit
3747
PTA
-150 days