Deposited-film forming apparatus
View Patent ↗With the deposited-film forming apparatus according to the first embodiment of the present invention, the distance between the tubular barrel and the evaporating section can be varied, unlike the prior art deposited-film forming apparatus and hence, the efficient formation of the deposited film on the surface of each of the work pieces accommodated in the tubular barrel and the inhibition of the softening of the formed film can be achieved simultaneously. Therefore, it is possible to inhibit the damaging of the deposited film formed on the surface of each of the work pieces and the production of projections on the deposited film, and to form a deposited film at a high quality in respect of a corrosion resistance and the like and at low cost. With the deposited-film forming apparatus according to the second embodiment of the present invention, the distance between the accommodating section defined in the tubular barrel and the evaporating section can be varied and hence, this deposited-film forming apparatus also exhibits an effect similar to that in the deposited-film forming apparatus according to the first embodiment of the present invention.
1. A deposited-film forming apparatus comprising
an evaporating section for at least one depositing material selection of the group consisting of aluminum, zinc, tin and magnesium and an alloy containing at least one of these metal components, and
a plurality of tubular barrels formed of a mesh net for accomodation of rare earth metal-based permanent magnets, on each of the surfaces of which a depositing material is to be deposited, said evaporating section and said tubular barrels being mounted in a vacuum-treating chamber, wherein said tubular barrels are detachably supported by support shafts provided at each side of each tubular barrel circumferentially outside a horizontal rotational axis of a support member rotatable about said rotational axis, for rotation about said rotational axis, so that the distance between said tubular barrel rotated about said rotated about said rotational axis of said support member and said evaporating section is varied by rotating said support member, wherein
said evaporating section receives electric current and heats the at least one depositing material by resistance heating, with the at least one depositing material being molten at said evaporating section.
2. A deposited-film forming apparatus according to claim 1 , wherein said plurality of said tubular barrels is supported in an annular shape circumferentially outside said rotational axis of said support member.