Self-sustained pulsating laser diode
View Patent ↗A self-sustained pulsating laser diode in which a region in an active layer functions as a saturable absorber has at least five and no more than ten quantum wells, p-type cladding layer flat part with a layer thickness of at least 300 nm and no greater than 500 nm, and a p-type cladding layer flat part with a carrier density of at least 1×10 17 cm −3 and no greater than 5×10 17 cm −3 . This laser diode achieves a sufficiently small current distribution compared with the light distribution in the lateral direction, thereby enabling stable self-sustained pulsating operation up to a high temperature, which was difficult to achieve in the past.
1. A self-sustained pulsating laser diode having a double-heterostructure comprising:
a first cladding layer of a first conductivity type;
a multi-quantum well active layer; and
a second cladding layer of a second conductivity type, both the first cladding layer and the second cladding layer being arranged on a semiconductor substrate of the first conductivity type, the number of said quantum wells being at least 5 and no greater than 10; and a layer thickness of a flat part of said second cladding layer having a current blocking structure being at least 300 nm and no greater than 500 nm; and a carrier density in said flat part of said second cladding layer having a current blocking structure being at least 1×10 17 cm −3 and no greater than 5×10 17 cm −3 .
2. A self-sustained pulsating laser diode having a double-heterostructure comprising:
a first cladding layer of a first conductivity type;
a multi-quantum well active layer of at least five well layers; and
a second cladding layer of a second conductivity type, both the first cladding layer and the second cladding layer being arranged on a semiconductor substrate of the first conductivity type, a layer thickness of a flat part of said second cladding layer having a current blocking structure being at least 300 nm,
an effective refractive index difference parallel to the layers (Δn), said index resulting from said at least five well layers and said layer thickness of at least 300 nm, being at least 7×10 −4 and no greater than 3×10 −3 , and
a carrier density in a flat part of said second cladding layer having a current blocking structure being at least 1×10 17 cm −3 and no greater than 5×10 17 cm −3 .
3. A self-sustained pulsating laser diode according to claim 1 , wherein said cladding layers are made of a semiconductor that includes AlGaInP, and said active layer is a semiconductor that includes at least one of GaInP and AlGaInP.
4. A self-sustained pulsating laser diode according to claim 2 , wherein said cladding layers are made of a semiconductor that includes AlGaInP, and said active layer is a semiconductor that includes at least one of GaInP and AlGaInP.
5. A self-sustained pulsating laser diode according to claim 1 , wherein the (001) plane of said semiconductor substrate is misoriented by 5 degrees or more toward the [110] direction, and wherein said multi-quantum well active layer consists of compressively strained quantum wells.
6. A self-sustained pulsating laser diode according to claim 2 , wherein the (001) plane of said semiconductor substrate is misoriented by 5 degrees or more toward the [110] direction, and wherein said multi-quantum well active layer consists of compressively strained quantum wells.
7. A self-sustained pulsating laser diode according to claim 3 , wherein the (001) plane of said semiconductor substrate is misoriented by 5 degrees or more toward the [110] direction, and wherein said multi-quantum well active layer consists of compressively strained quantum wells.
8. A self-sustained pulsating laser diode according to claim 4 , wherein the (001) plane of said semiconductor substrate is misoriented by 5 degrees or more toward the [110] direction, and wherein said multi-quantum well active layer consists of compressively strained quantum wells.
9. A self-sustained pulsating laser diode according to claim 1 , wherein said carrier density in said flat part of said second cladding layer having a current blocking structure is less than 3×10 17 cm −3 .
10. A self-sustained pulsating laser diode according to claim 2 , wherein said carrier density in said flat part of said second cladding layer having a current blocking structure is less than 3×10 17 cm −3 .