IP Library Granted Patent US 6,420,705
Granted Patent Utility
US 6,420,705 · Confirmation No. 4950

METHOD AND APPARATUS FOR INSPECTION OF A SUBSTRATE BY USE OF A RING ILLUMINATOR

⬇ PDF
Code Description Pages PDF
2001-03-29 TRNA Transmittal of New Application 8 View
2001-03-29 A.PE Preliminary Amendment 8 View
2001-03-29 SPEC Specification 10 View
2001-03-29 CLM Claims 5 View
2001-03-29 ABST Abstract 1 View
2001-03-29 DRW Drawings-only black and white line drawings 2 View
2001-03-29 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,420,705
App. No.
09/821,426
Filed
2001-03-29
Granted
2002-07-16
Pub. No.
US20010054693A1
Art Unit
2878
PTA
-162 days