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App. No. 09/827,560 · Confirmation No. 6420

Electron-beam cured polymer mask for DRIE micro-machining

Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-04-05 TRNA Transmittal of New Application 2 View
2001-04-05 SPEC Specification 6 View
2001-04-05 CLM Claims 3 View
2001-04-05 ABST Abstract 1 View
2001-04-05 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
09/827,560
Filed
2001-04-05
Pub. No.
US20010045527A1
Art Unit
2881