IP Library Granted Patent US 6,665,065
Granted Patent Utility
US 6,665,065 · Confirmation No. 6843

DEFECT DETECTION IN PELLICIZED RETICLES VIA EXPOSURE AT SHORT WAVELENGTHS

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Code Description Pages PDF
2003-10-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-04-09 TRNA Transmittal of New Application 3 View
2001-04-09 SPEC Specification 25 View
2001-04-09 CLM Claims 5 View
2001-04-09 ABST Abstract 1 View
2001-04-09 DRW Drawings-only black and white line drawings 10 View
2001-04-09 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,665,065
App. No.
09/829,195
Filed
2001-04-09
Granted
2003-12-16
Art Unit
2877
PTA
-1 days