Granted Patent
Utility
US 6,665,065
· Confirmation No. 6843
DEFECT DETECTION IN PELLICIZED RETICLES VIA EXPOSURE AT SHORT WAVELENGTHS
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-04-09 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-04-09 | SPEC |
Specification | 25 | View | |
| 2001-04-09 | CLM |
Claims | 5 | View | |
| 2001-04-09 | ABST |
Abstract | 1 | View | |
| 2001-04-09 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-04-09 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
356/237.1
Prosecution
- Examiner
- NGUYEN, SANG H
- Art Unit
- 2877
- Docket No.
- F0645
- Confirmation No.
- 6843
Patent Term Adjustment
-1days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-03-30
SECURITY INTEREST
Recorded 2019-04-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-09
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Quick Facts
- Patent No.
- US 6,665,065
- App. No.
- 09/829,195
- Filed
- 2001-04-09
- Granted
- 2003-12-16
- Examiner
- NGUYEN, SANG H
- Art Unit
- 2877
- PTA
- -1 days
External Links