Granted Patent
Utility
PCT National Stage
US 6,474,987
· Confirmation No. 8326
WAFER HOLDER
Patented Case
View Patent ↗
Inventors
Tetsuya Nakai
Tokyo, JAPAN
Katsuo Arai
Saitama, JAPAN
Makoto Shinohara
Kanagawa, JAPAN
Fumitomo Kawahara
Okayama, JAPAN
Makoto Saito
Okayama, JAPAN
Yasuhiko Kawamura
Okayama, JAPAN
Attorneys & Agents of Record
Classification
USPC
432/258
H10P32/00
H10P72/7611
H10P72/7614
H10P72/127
C23C16/4583
C30B25/12
C30B31/14
Prosecution
- Examiner
- WILSON, GREGORY A
- Art Unit
- 3749
- Customer No.
- 28062
- Docket No.
- JG-SU-5064/ZS26.012
- Confirmation No.
- 8326
Foreign Priority
HEI11-249480
·
1999-09-03
·
JAPAN
2000-160033
·
2000-05-30
·
JAPAN
Patent Term Adjustment
-30days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-08-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-08-01
MERGER
Recorded 2005-08-01
MITSUBISHI MATERIALS SILICON CORPORATION,
MITSUI ENGINEERING & SHIP BUILDING CO., LTD.,
SHINKU GIKEN CO., LTD.
from
KAWAHARA, FUMITOMO,
KAWAMURA, YASUHIKO,
NAKAI, TETSUYA,
SHINOHARA, MAKOTO,
ARAI, KATSUO,
SAITO, MAKOTO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-13
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Quick Facts
- Patent No.
- US 6,474,987
- App. No.
- 09/831,032
- Filed
- 2001-07-09
- Granted
- 2002-11-05
- Examiner
- WILSON, GREGORY A
- Art Unit
- 3749
- PTA
- -30 days
External Links