IP Library › Granted Patent US 6,509,240
Granted Patent Utility
US 6,509,240 · Confirmation No. 5066

ANGLE IMPLANT PROCESS FOR CELLULAR DEEP TRENCH SIDEWALL DOPING

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 Code Description Pages PDF
2001-05-10 TRNA Transmittal of New Application 1 View
2001-05-10 ADS Application Data Sheet 1 View
2001-05-10 SPEC Specification 5 View
2001-05-10 CLM Claims 1 View
2001-05-10 ABST Abstract 1 View
2001-05-10 DRW Drawings-only black and white line drawings 2 View
2001-05-10 OATH Oath or Declaration filed 1 View
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Quick Facts
Patent No.
US 6,509,240
App. No.
09/852,579
Filed
2001-05-10
Granted
2003-01-21
Pub. No.
US20010041400A1
Examiner
NHU, DAVID
Art Unit
2818
PTA
0 days