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App. No. 09/853,732 · Confirmation No. 6502

PHOTORESIST COMPOSITION FOR DEEP ULTRAVIOLET LITHOGRAPHY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-03-31 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-03 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
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2004-02-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-03 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-01-26 A.NE Response After Final Action 1 View
2004-01-09 LET. Miscellaneous Incoming Letter 3 View
2004-01-09 A.NE Response After Final Action 3 View
2004-01-09 CLM Claims 6 View
2004-01-09 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-09-25 CTFR Final Rejection 8 View
2003-09-25 892 List of references cited by examiner 1 View
2003-06-06 LET. Miscellaneous Incoming Letter 1 View
2003-06-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-06-06 SPEC Specification 1 View
2003-06-06 CLM Claims 6 View
2003-06-06 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-02-06 CTNF Non-Final Rejection 10 View
2003-02-06 1449 List of References cited by applicant and considered by examiner 2 View
2003-01-29 SRNT Examiner's search strategy and results 4 View
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2003-01-27 SRNT Examiner's search strategy and results 20 View
2002-10-30 FOR Foreign Reference 22 View
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2002-10-30 FOR Foreign Reference 12 View
2002-10-30 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2002-10-30 1449 List of References cited by applicant and considered by examiner 1 View
2002-10-30 FOR Foreign Reference 7 View
2002-09-11 FOR Foreign Reference 40 View
2002-09-11 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2001-05-11 TRNA Transmittal of New Application 8 View
2001-05-11 SPEC Specification 19 View
2001-05-11 CLM Claims 5 View
2001-05-11 ABST Abstract 1 View
2001-05-11 OATH Oath or Declaration filed 3 View
2001-05-11 FOR Foreign Reference 78 View
2001-05-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-05-11 SRFW Search information including classification, databases and other search related notes 1 View
2001-05-11 FWCLM Index of Claims 1 View
2001-05-11 TRNA Transmittal of New Application 10 View
2001-05-11 SPEC Specification 19 View
2001-05-11 CLM Claims 5 View
2001-05-11 ABST Abstract 1 View
2001-05-11 OATH Oath or Declaration filed 3 View
2001-05-11 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
09/853,732
Filed
2001-05-11
Granted
2004-05-18
Pub. No.
US20020187419A1
Art Unit
1752
PTA
-46 days