IP Library Patent Application 09855962
Patent Application Utility
App. No. 09/855,962 · Confirmation No. 1309

AUTOMATED SPRAY CLEANING APPARATUS FOR SEMICONDUCTOR WAFERS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2003-08-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-05-15 TRNA Transmittal of New Application 3 View
2001-05-15 SPEC Specification 31 View
2001-05-15 CLM Claims 9 View
2001-05-15 ABST Abstract 1 View
2001-05-15 DRW Drawings-only black and white line drawings 11 View
2001-05-15 OATH Oath or Declaration filed 3 View
2001-05-15 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
09/855,962
Filed
2001-05-15
Granted
2003-10-28
Pub. No.
US20020170579A1
Art Unit
1746
PTA
0 days