IP Library › Granted Patent US 6,619,901
Granted Patent Utility PCT National Stage
US 6,619,901 · Confirmation No. 3276

METHOD AND APPARATUS FOR AIR GUIDANCE IN A PROCESSING CHAMBER

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2003-07-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-01-23 ABST Abstract 1 View
2002-01-23 LET. Miscellaneous Incoming Letter 37 View
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Quick Facts
Patent No.
US 6,619,901
App. No.
09/857,366
Filed
2002-01-23
Effective Filing
2001-06-04
Granted
2003-09-16
Art Unit
3749
PTA
0 days