Granted Patent
Utility
US 6,509,955
· Confirmation No. 2612
LENS SYSTEM FOR MASKLESS PHOTOLITHOGRAPHY
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-02-28 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-05-16 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-05-16 | SPEC |
Specification | 15 | View | |
| 2001-05-16 | CLM |
Claims | 4 | View | |
| 2001-05-16 | ABST |
Abstract | 1 | View | |
| 2001-05-16 | DRW |
Drawings-only black and white line drawings | 10 | View |
Inventors
Wenhui Mei
Plano, TX
Takashi Kanatake
Dallas, TX
Attorneys & Agents of Record
Classification
USPC
355/53
Prosecution
- Examiner
- BROWN, KHALED
- Art Unit
- 2851
- Customer No.
- 98460
- Docket No.
- 22397.285
- Confirmation No.
- 2612
Publication
- Pub. No.
- US20020021426A1
- Pub. Date
- 2002-02-21
Patent Term Adjustment
-63days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-12-21
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-09
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Quick Facts
- Patent No.
- US 6,509,955
- App. No.
- 09/858,711
- Filed
- 2001-05-16
- Granted
- 2003-01-21
- Pub. No.
- US20020021426A1
- Examiner
- BROWN, KHALED
- Art Unit
- 2851
- PTA
- -63 days
External Links