IP Library Granted Patent US 6,426,237
Granted Patent Utility
US 6,426,237 · Confirmation No. 9171

METHOD FOR PRODUCING OPTICALLY PLANAR SURFACES FOR MICRO-ELECTROMECHANICAL SYSTEM DEVICES

⬇ PDF
Code Description Pages PDF
2001-05-30 TRNA Transmittal of New Application 1 View
2001-05-30 SPEC Specification 17 View
2001-05-30 CLM Claims 6 View
2001-05-30 ABST Abstract 1 View
2001-05-30 DRW Drawings-only black and white line drawings 13 View
2001-05-30 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,426,237
App. No.
09/867,928
Filed
2001-05-30
Granted
2002-07-30
Pub. No.
US20010029058A1
Art Unit
2812
PTA
-120 days