IP Library › Granted Patent US 6,705,124
Granted Patent Utility
US 6,705,124 · Confirmation No. 5827

HIGH-DENSITY PLASMA DEPOSITION PROCESS FOR FABRICATING A TOP CLAD FOR PLANAR LIGHTWAVE CIRCUIT DEVICES

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Quick Facts
Patent No.
US 6,705,124
App. No.
09/874,434
Filed
2001-06-04
Granted
2004-03-16
Pub. No.
US20020178759A1
Art Unit
1731
PTA
-91 days