IP Library Granted Patent US 6,499,535
Granted Patent Utility
US 6,499,535 · Confirmation No. 4555

TEMPERATURE CONTROL OF INDIVIDUAL TOOLS IN A CLUSTER TOOL SYSTEM

Inventor: Kenneth W. Cowans
⬇ PDF
Code Description Pages PDF
2015-03-10 OATH Oath or Declaration filed 47 View
2001-07-06 TRNA Transmittal of New Application 2 View
2001-07-06 SPEC Specification 35 View
2001-07-06 CLM Claims 25 View
2001-07-06 ABST Abstract 1 View
2001-06-13 TRNA Transmittal of New Application 20 View
2001-06-13 SPEC Specification 35 View
2001-06-13 CLM Claims 25 View
2001-06-13 ABST Abstract 1 View
2001-06-13 DRW Drawings-only black and white line drawings 7 View
2001-06-13 OATH Oath or Declaration filed 7 View
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Quick Facts
Patent No.
US 6,499,535
App. No.
09/879,006
Filed
2001-06-13
Granted
2002-12-31
Pub. No.
US20020029877A1
Art Unit
3743
PTA
-31 days