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App. No. 09/883,437 · Confirmation No. 2795

HIGH CONTRAST LITHOGRAPHY ALIGNMENT MARKS FOR SEMICONDUCTOR MANUFACTURING WITH LSA

Abandoned -- Failure to Pay Issue Fee View Publication ↗
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2005-02-02 ABN Abandonment 2 View
2005-01-12 BIB Bibliographic Data Sheet 1 View
2005-01-07 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-12-23 PA.. Power of Attorney 3 View
2004-09-27 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-09-27 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-09-27 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-09-27 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-27 BIB Bibliographic Data Sheet 1 View
2004-09-27 IMIS Miscellaneous Internal Document 1 View
2004-09-23 CLMPTO Complete Marked Up Copy of Claims Prepared by USPTO 2 View
2004-09-22 SRNT Examiner's search strategy and results 1 View
2004-09-21 SRNT Examiner's search strategy and results 1 View
2004-05-24 ELC. Response to Election / Restriction Filed 2 View
2004-05-24 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-05-04 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2004-04-20 CTRS Requirement for Restriction/Election 5 View
2004-04-20 FWCLM Index of Claims 1 View
2003-10-02 PETDEC Petition Decision 2 View
2003-09-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-22 SPEC Specification 1 View
2003-09-22 CLM Claims 2 View
2003-09-22 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-09-22 PET. Petition Entered 2 View
2003-06-23 ABN Abandonment 2 View
2002-10-07 CTNF Non-Final Rejection 7 View
2002-10-07 892 List of references cited by examiner 1 View
2002-09-29 SRNT Examiner's search strategy and results 8 View
2002-09-18 EABN Letter Express Abandonment of the application 1 View
2002-09-03 ELC. Response to Election / Restriction Filed 2 View
2002-07-29 CTRS Requirement for Restriction/Election 5 View
2002-02-22 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2002-02-22 DRW Drawings-only black and white line drawings 16 View
2002-02-22 OATH Oath or Declaration filed 3 View
2001-08-14 PEFN Pre-Exam Formalities Notice 1 View
2001-06-18 TRNA Transmittal of New Application 3 View
2001-06-18 SPEC Specification 16 View
2001-06-18 CLM Claims 7 View
2001-06-18 ABST Abstract 1 View
2001-06-18 DRW Drawings-only black and white line drawings 16 View
2001-06-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-06-18 SRFW Search information including classification, databases and other search related notes 1 View
2001-06-18 FWCLM Index of Claims 1 View
2001-06-18 TRNA Transmittal of New Application 3 View
2001-06-18 DRW Drawings-only black and white line drawings 16 View
2001-06-18 SPEC Specification 16 View
2001-06-18 CLM Claims 7 View
2001-06-18 ABST Abstract 1 View
2001-06-18 BIB Bibliographic Data Sheet 2 View
2001-06-18 WFEE Fee Worksheet (SB06) 1 View
2001-06-18 WFEE Fee Worksheet (SB06) 1 View
2001-06-18 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
09/883,437
Filed
2001-06-18
Pub. No.
US20020192926A1
Art Unit
2813