IP Library Granted Patent US 6,569,237
Granted Patent Utility
US 6,569,237 · Confirmation No. 3991

METHOD OF PULLING UP SILICON SINGLE CRYSTAL AND METHOD OF MANUFACTURING EPITAXIAL WAFER

⬇ PDF
Code Description Pages PDF
2001-06-21 TRNA Transmittal of New Application 3 View
2001-06-21 SPEC Specification 15 View
2001-06-21 CLM Claims 3 View
2001-06-21 ABST Abstract 1 View
2001-06-21 DRW Drawings-only black and white line drawings 7 View
2001-06-21 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,569,237
App. No.
09/884,994
Filed
2001-06-21
Granted
2003-05-27
Pub. No.
US20020000189A1
Art Unit
1765
PTA
0 days