IP Library Granted Patent US 6,458,605
Granted Patent Utility
US 6,458,605 · Confirmation No. 6222

METHOD AND APPARATUS FOR CONTROLLING PHOTOLITHOGRAPHY OVERLAY REGISTRATION

Inventor: James Broc Stirton
Patented Case View Patent ↗
⬇ PDF
Code Description Pages PDF
2001-06-28 TRNA Transmittal of New Application 3 View
2001-06-28 SPEC Specification 26 View
2001-06-28 CLM Claims 15 View
2001-06-28 ABST Abstract 1 View
2001-06-28 DRW Drawings-only black and white line drawings 8 View
2001-06-28 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,458,605
App. No.
09/894,546
Filed
2001-06-28
Granted
2002-10-01
Art Unit
2813
PTA
-75 days