IP Library › Granted Patent US 6,576,152
Granted Patent Utility
US 6,576,152 · Confirmation No. 3418

DRY ETCHING METHOD

Inventor: Tetsuya Matsutani
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-07-06 TRNA Transmittal of New Application 2 View
2001-07-06 SPEC Specification 26 View
2001-07-06 CLM Claims 2 View
2001-07-06 ABST Abstract 1 View
2001-07-06 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
Patent No.
US 6,576,152
App. No.
09/899,548
Filed
2001-07-06
Granted
2003-06-10
Pub. No.
US20020008083A1
Art Unit
1746
PTA
-121 days