IP Library › Granted Patent US 6,537,606
Granted Patent Utility
US 6,537,606 · Confirmation No. 8195

SYSTEM AND METHOD FOR IMPROVING THIN FILMS BY GAS CLUSTER ION BEAM PROCESSING

Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-07-10 TRNA Transmittal of New Application 2 View
2001-07-10 SPEC Specification 27 View
2001-07-10 CLM Claims 6 View
2001-07-10 ABST Abstract 1 View
2001-07-10 DRW Drawings-only black and white line drawings 17 View
2001-07-10 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,537,606
App. No.
09/902,306
Filed
2001-07-10
Granted
2003-03-25
Pub. No.
US20020014407A1
Art Unit
1753
PTA
-104 days