IP Library › Granted Patent US 6,441,885
Granted Patent Utility
US 6,441,885 · Confirmation No. 1496

LOW THERMAL DISTORTION EXTREME-UV LITHOGRAPHY RETICLE

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 Code Description Pages PDF
2001-07-10 TRNA Transmittal of New Application 4 View
2001-07-10 A.PE Preliminary Amendment 11 View
2001-07-10 SPEC Specification 13 View
2001-07-10 CLM Claims 4 View
2001-07-10 ABST Abstract 1 View
2001-07-10 DRW Drawings-only black and white line drawings 2 View
2001-07-10 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,441,885
App. No.
09/903,196
Filed
2001-07-10
Granted
2002-08-27
Pub. No.
US20020006556A1
Examiner
KIM, PETER B
Art Unit
2851
PTA
0 days